You know that an organic thin film vacuum deposition process oled modules

OLED devices require multilayer organic thin film vapor deposition in a high vacuum chamber, the quality of the film is related to the quality and lifetime of the device. Placed in a high vacuum chamber is provided with a plurality of organic material evaporation boat, the heating the evaporation boat vapor deposition of organic material, and use of a quartz crystal oscillator to control the film thickness. ITO glass substrate is placed in a heated rotating sample holder, placed below the metal mask to control the deposition pattern.QVGA lcd
Evaporation experiment was carried out in a vacuum vapor deposition equipment, experimental results show that the evaporation temperature of the organic material is generally between 170 ° C to 400 ° C, an ITO sample substrate temperature at 100 ° C to 150 ° C, the evaporation rate in the crystal point ~ 10 crystal points / sec (i.e., approximately 0.1 nm to 1 nm / s), the vaporization chamber, the degree of vacuum of 5 × 10-4Pa ~ 3 × 10-4Pa when deposition better.
However, the vapor deposition of organic material is also effective material usage rate is low (<10%), the dopant concentration is difficult to precisely control the evaporation rate is unstable, easily contaminated inadequacies of the vacuum chamber, resulting in Samples substrate the the coating uniformity reach devices require.SPI lcds